Inlet flange

VG100
CF100
ISO-B100

Volume flow rate (L/s)

N2

340

(with protective screen) N2

320

H2

290

Max. compression ratio

N2

1x10⁸

H2

4.5x10³

Ultimate pressure

(Pa)

VG, ISO-B/CF

<1x10^-6/<1x10^-7

(Torr)

VG, ISO-B/CF

<7.5x10^-9/<7.5x10^-10

Max. throughput^*1 (sccm)

N2

2000

Startup time (min)

2-3

Shutdown time (min)

4-5

Max. backing pressure (Pa/Torr)

400/3

Recommended backing vacuum pump (L/min)

≧160

Position

Any orientation

Weight (kg)

VG, ISO-B/CF

14/17

Controller

TC010MA

Special specifications
(For details, contact our sales representative)

-Chemical-use

-Thermal insulation TG-MI

-Ultra low vibration TG-ML

*1 : When using a backing vacuum pump of 320L/min.
[Ambient temperature for use]
The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.
[Corresponding gases]
Some types of gas to be evacuated may damage the pump.
Contact Osaka Vacuum for a list of applicable gas types.

TMP Models

Any Orientation Type
TG50F	TG60F
TG70F	TG220F
TG240F	TG350F
TG450F	TG800F
TG1100F	TG1400F
TG2400F	TG2410F

Magnetically Suspended Type
TG390M	TG420M
TG900M	TG907M
TG1300M	TG1307M
TG2400M

Magnetically Suspended Integrated Control Unit Type
TGkine2200M
TGkine3300M
TGkine4200M

Oil Lubricated Type
TG203	TG553
TG1003	TG1303
TG1810⁄1813
TG2813
TG3213
TG3413
TG5000⁄5003
TG5500⁄5503

TMP Pumping System
ST Series
ST-Compact Series


VG100	φ185	15	263
CF100	φ152	21	269
ISO-B100	φ165	12	260


VG100	φ185	15	263
CF100	φ152	21	269
ISO-B100	φ165	12	260

Zoom Clicking the "Zoom" button opens the file in Acrobat Reader. Print from the PDF.

Bolt holes for the flange on the intake are arranged symmetrically around the centerline.
Reprinting prohibited without permission. Contents are subject to change without notice.

Compare performance

Throughput

Volume flow rate for N2

Reprinting prohibited without permission. Contents are subject to change without notice.

TC010MA

Controller model	TC010MA
Input Voltage (ACV)	200-240 (±10%)
Input Frequency (Hz)	50/60
Input Phases	Single
Input Power (VA)	700
Rated Output Frequency (Hz)	680
Weight (kg)	11
Standard accessories	-Input cable (5m): 1 -Remote connector: 1 -Manual (Instruction, Serial communication instruction): 1 copy
TMP	TG390M

Turbo Molecular Pump Exhaust Theory

Turbo molecular pumps consist of moving and stator blades arranged on multiple levels. The figure below shows the relation between the angle and rotating direction of the blades. Gas molecules inbound from the high vacuum side enter the moving blades and try to exit in various directions. However, the angle and rotation of the blades cause the molecules to move toward the exhaust end and through the quickest path in the stator. Gas molecules that flow back from the rearmost stage through the stator hit the moving blade, sending them back to the exhaust end. The blades are angled on the front end to facilitate passage of gaseous molecules (where the difference between the flow to and from the exhaust is greater), whereas on the exhaust end, the blades are angled to hinder passage (where the ratio between the flow in the exhaust direction and against it is greater). In the area of molecular flow, the moving blade and stator perform the basic functions of the turbo molecular pump.

Osaka Vacuum added the threaded groove to the moving blade and stator blade combination. The walls of the cylindrical rotor drag the gas molecules along the threaded groove in the stator, delivering them to the back pressure side. The functionality of the threaded groove enabled us to develop a turbo molecular pump (compound molecular pump) capable of exhausting large flow volumes, particularly in medium flow ranges in addition to the molecular flow range. This expanded the operating range for turbo molecular pumps which are now used in a wide variety of applications. And its ability to operate under high back pressure has widened the choices for auxiliary pumps.

Exhaust theory(Front end side)
Exhaust theory(End exhaust)
Exhaust theory(Grooved side)

Cross-section of a turbo molecular pump
(Grease Lubricated Type)

TG390M

Throughput

Volume flow rate for N2

Turbo Molecular Pump Exhaust Theory

Cross-section of a turbo molecular pump(Grease Lubricated Type)

Cross-section of a turbo molecular pump
(Grease Lubricated Type)